§ Mr. Skinnerasked the Secretary of State for Employment what information he has available regarding the names of hazardous chemicals and gases used in the microelectronics industry.
§ Mr. GummerMany chemicals are used in the microelectronics industry, which includes the production and manufacture of semiconductors or "chips". Whilst many of the chemicals are commonly encountered in other industries there is a specific number of elements and compounds, of high purity, which are only used or produced in the microelectronics industry and these are mainly associated with the small scale production and manufacture of semiconductor devices.
Some of the more toxic chemical elements include arsenic, indium and tellurium which are used to form single crystal compounds such as gallium arsenide and indium phosphide. Subsequent treatment of the chips requires the use of single and mixed gases, some of which are extremely toxic, such as arsine and phosphine; irritant gases such as boron trifluoride and chloro silanes; and spontaneously flammable gases such as silane. Other chemicals used in polishing and etching process include bromine, hydrofluoric acid and various solvents.